![File:Extreme ultraviolet lithography tool.jpg](https://upload.wikimedia.org/wikipedia/commons/thumb/3/36/Extreme_ultraviolet_lithography_tool.jpg/707px-Extreme_ultraviolet_lithography_tool.jpg)
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Date/Time | Thumbnail | Dimensions | User | Comment | |
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current | 18:19, 22 September 2011 | ![]() | 713 × 605 (80 KB) | Bomazi | {{Information |Description ={{en|1=EUVL tool, that deposits virtually defect-free, ultra-thin films on integrated circuits.}} |Source =''Laser Programs, the first 25 years, 1972-1997'', available from [http://www.osti.gov/bridge/product.biblio. |
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